검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In situ spectroscopic ellipsometry of carbon nucleation and growth on Si in a deposition process by DC glow discharge of methane Moritani A, Kitahara K, Kitamura T, Katayama H, Kanayama N, Suzuki M Thin Solid Films, 386(2), 137, 2001 |