검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristics Mai L, Pham VS, Yoon G Journal of Vacuum Science & Technology A, 27(1), 67, 2009 |
| 2 |
Polycrystalline AlN films with preferential orientation by plasma enhanced chemical vapor deposition Sanchez G, Wu A, Tristant P, Tixier C, Soulestin B, Desmaison J, Alles AB Thin Solid Films, 516(15), 4868, 2008 |