검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Sputter rate variations in silicon under high-k dielectric films Bennett J, Beebe M, Sparks C, Gondran C, Vandervorst W Applied Surface Science, 231-2, 565, 2004 |
| 2 |
On the reliability of SIMS depth profiles through HfO2-stacks Vandervorst W, Bennett J, Huyghebaert C, Conard T, Gondran C, De Witte H Applied Surface Science, 231-2, 569, 2004 |
| 3 |
Latest developments for the CAMECA ULE-SIMS instruments: IMS Wf and SC-Ultra de Chambost E, Merkulov A, Peres P, Rasser B, Schuhmacher M Applied Surface Science, 231-2, 949, 2004 |