검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of rf power on the structural properties of carbon nitride thin films prepared by plasma enhanced chemical vapour deposition Othman M, Ritikos R, Khanis NH, Rashid NMA, Rahman SA, Ab Gani SM, Muhamad MR Thin Solid Films, 519(15), 4981, 2011 |
| 2 |
Crystallinity and strain control growth of SiGe using ion sputtering technique Sasaki K, Yoshimori K Thin Solid Films, 508(1-2), 124, 2006 |