검색결과 : 3건
No. | Article |
---|---|
1 |
Improvement of metal gate/high-k dielectric CMOSFETs characteristics by atomic layer etching of high-k gate dielectric Min KS, Park C, Kang CY, Park CS, Park BJ, Kim YW, Lee BH, Lee JC, Bersuker G, Kirsch P, Jammy R, Yeom GY Solid-State Electronics, 82, 82, 2013 |
2 |
저에너지의 Ar 중성빔을 이용한 Silicon의 Atomic Layer Etching 오창권, 박상덕, 염근영 Korean Journal of Materials Research, 16(4), 213, 2006 |
3 |
Layer-by-layer etching of Cl-adsorbed silicon surfaces by low energy Ar+ ion irradiation Kim BJ, Chung S, Cho SM Applied Surface Science, 187(1-2), 124, 2002 |