화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Improvement of metal gate/high-k dielectric CMOSFETs characteristics by atomic layer etching of high-k gate dielectric
Min KS, Park C, Kang CY, Park CS, Park BJ, Kim YW, Lee BH, Lee JC, Bersuker G, Kirsch P, Jammy R, Yeom GY
Solid-State Electronics, 82, 82, 2013
2 저에너지의 Ar 중성빔을 이용한 Silicon의 Atomic Layer Etching
오창권, 박상덕, 염근영
Korean Journal of Materials Research, 16(4), 213, 2006
3 Layer-by-layer etching of Cl-adsorbed silicon surfaces by low energy Ar+ ion irradiation
Kim BJ, Chung S, Cho SM
Applied Surface Science, 187(1-2), 124, 2002