검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Preparation of large uniform amorphous silicon films by VHF-PECVD using a ladder-shaped antenna Takeuchi Y, Nawata Y, Ogawa K, Serizawa A, Yamauchi Y, Murata M Thin Solid Films, 386(2), 133, 2001 |
| No. | Article |
|---|---|
| 1 |
Preparation of large uniform amorphous silicon films by VHF-PECVD using a ladder-shaped antenna Takeuchi Y, Nawata Y, Ogawa K, Serizawa A, Yamauchi Y, Murata M Thin Solid Films, 386(2), 133, 2001 |