검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Inhibition effect of glycine on molybdenum corrosion during CMP in alkaline H2O2 based abrasive free slurry Yang G, He P, Qu XP Applied Surface Science, 427, 148, 2018 |
| 2 |
Research on Si (100) crystal substrate CMP based on FA/O alkaline slurry Hong J, Niu XH, Wang J, Wang CW, Zhang BG, Wang R, Sun M, Liu YL Applied Surface Science, 420, 483, 2017 |
| 3 |
Chemical mechanical planarization of copper in alkaline slurry with uric acid as inhibitor Prasad YN, Ramanathan S Electrochimica Acta, 52(22), 6353, 2007 |