검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating Singh AV, Chandra S, Bose G Thin Solid Films, 519(18), 5846, 2011 |
| 2 |
Film Bulk Acoustic-Wave Resonator Based Relative Humidity Sensor Using ZnO Films Qiu XT, Oiler J, Zhu J, Wang ZY, Tang R, Yu CJ, Yu HY Electrochemical and Solid State Letters, 13(5), J65, 2010 |
| 3 |
Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristics Mai L, Pham VS, Yoon G Journal of Vacuum Science & Technology A, 27(1), 67, 2009 |