검색결과 : 1건
No. | Article |
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1 |
Kinetics of O-2+teos Gas-Phase Chemical-Reactions in a Remote RF Plasma Reactor with Electron-Spin-Resonance Janca J, Talsky A, Zvonicek V Plasma Chemistry and Plasma Processing, 16(2), 187, 1996 |
No. | Article |
---|---|
1 |
Kinetics of O-2+teos Gas-Phase Chemical-Reactions in a Remote RF Plasma Reactor with Electron-Spin-Resonance Janca J, Talsky A, Zvonicek V Plasma Chemistry and Plasma Processing, 16(2), 187, 1996 |