검색결과 : 1건
No. | Article |
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1 |
Applications of Computational Fluid-Dynamics for Improved Performance in Chemical-Vapor-Deposition Reactors Kotecki DE, Conti RA, Barbee SG, Cacouris TD, Chapplesokol JD, Eschbach RJ, Wilson DL, Wong J, Zuhoski SP Journal of Vacuum Science & Technology B, 12(4), 2752, 1994 |