검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Polysilicon sealed vacuum cavities for microelectromechanical systems Zook JD, Herb WR, Ahn Y, Guckel H Journal of Vacuum Science & Technology A, 17(4), 2286, 1999 |
| No. | Article |
|---|---|
| 1 |
Polysilicon sealed vacuum cavities for microelectromechanical systems Zook JD, Herb WR, Ahn Y, Guckel H Journal of Vacuum Science & Technology A, 17(4), 2286, 1999 |