검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Pattern Geometry-Effects in the Chemical-Mechanical Polishing of Inlaid Copper Structures Steigerwald JM, Zirpoli R, Murarka SP, Price D, Gutmann RJ Journal of the Electrochemical Society, 141(10), 2842, 1994 |
| No. | Article |
|---|---|
| 1 |
Pattern Geometry-Effects in the Chemical-Mechanical Polishing of Inlaid Copper Structures Steigerwald JM, Zirpoli R, Murarka SP, Price D, Gutmann RJ Journal of the Electrochemical Society, 141(10), 2842, 1994 |