검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Phase analysis of TaN/Ta barrier layers in sub-micrometer trench structures for Cu interconnects Traving M, Zienert I, Zschech E, Schindler G, Steinhogl W, Engelhardt A Applied Surface Science, 252(1), 11, 2005 |
| No. | Article |
|---|---|
| 1 |
Phase analysis of TaN/Ta barrier layers in sub-micrometer trench structures for Cu interconnects Traving M, Zienert I, Zschech E, Schindler G, Steinhogl W, Engelhardt A Applied Surface Science, 252(1), 11, 2005 |