검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Negative Resist Corner Rounding - Envelope Volume Modeling Hagouel PI, Neureuther AR, Zenk AM Journal of Vacuum Science & Technology B, 14(6), 4257, 1996 |
| 2 |
Negative-Tone Deep-Ultraviolet Resists Containing Benzylic Cross-Linkers - Experimental and Simulation Studies of the Cross-Linking Process Zenk AM, Neureuther AR, Lee SM, Frechet JM Journal of Vacuum Science & Technology B, 12(6), 3851, 1994 |