검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Low-power thick-film gas sensor obtained by a combination of screen printing and micromachining techniques Vincenzi D, Butturi MA, Stefancich M, Malagu C, Guidi V, Carotta MC, Martinelli G, Guarnieri V, Brida S, Margesin B, Giacomozzi F, Zen M, Vasiliev AA, Pisliakov AV Thin Solid Films, 391(2), 288, 2001 |
| 2 |
Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications Paranjape M, Pandy A, Brida S, Landsberger L, Kahrizi M, Zen M Journal of Vacuum Science & Technology A, 18(2), 738, 2000 |
| 3 |
Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies Vincenzi D, Butturi MA, Guidi V, Carotta MC, Martinelli G, Guarnieri V, Brida S, Margesin B, Giacomozzi F, Zen M, Giusti D, Soncini G, Vasiliev AA, Pisliakov AV Journal of Vacuum Science & Technology B, 18(5), 2441, 2000 |
| 4 |
Oxide-Growth Effects in Micron End Submicron Field Regions - A Comparison Between Wet and Dry Oxidation Bellutti P, Zen M Journal of the Electrochemical Society, 143(9), 2953, 1996 |