검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Laser processing and characterization of ZnS-Cu thin films Khomchenko V, Fedorenko L, Yusupov N, Rodionov V, Bacherikov Y, Svechnikov G, Zavyalova L, Roshchina N, Lytvyn P, Mukhlio M Applied Surface Science, 247(1-4), 434, 2005 |
| 2 |
Hyper NA water immersion lithography at 193 nm and 248 nm Smith BW, Fan YF, Zhou JM, Bourov A, Zavyalova L, Lafferty N, Cropanese F, Estroff A Journal of Vacuum Science & Technology B, 22(6), 3439, 2004 |
| 3 |
Plasma reactive ion etching of 193 nm attenuated phase shift mask materials Smith BW, Fonseca C, Zavyalova L, Alam Z, Bourov A Journal of Vacuum Science & Technology B, 15(6), 2259, 1997 |
| 4 |
Investigation into excimer laser radiation damage of deep ultraviolet optical phase masking films Smith BW, Zavyalova L, Bourov A, Butt S, Fonseca C Journal of Vacuum Science & Technology B, 15(6), 2444, 1997 |