검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Very low-pressure VLP-CVD growth of high quality gamma-Al2O3 films on silicon by multi-step process Tan LW, Zan YD, Wang J, Wang QY, Yu YH, Wang SR, Liu ZL, Lin LY Journal of Crystal Growth, 236(1-3), 261, 2002 |
| No. | Article |
|---|---|
| 1 |
Very low-pressure VLP-CVD growth of high quality gamma-Al2O3 films on silicon by multi-step process Tan LW, Zan YD, Wang J, Wang QY, Yu YH, Wang SR, Liu ZL, Lin LY Journal of Crystal Growth, 236(1-3), 261, 2002 |