검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers Reading MA, van den Berg JA, Zalm PC, Armour DG, Bailey P, Noakes TCQ, Parisini A, Conard T, De Gendt S Journal of Vacuum Science & Technology B, 28(1), C1C65, 2010 |
| 2 |
Review of Secondary-Ion Mass-Spectrometry Characterization of Contamination Associated with Ion-Implantation Stevie FA, Wilson RG, Simons DS, Current MI, Zalm PC Journal of Vacuum Science & Technology B, 12(4), 2263, 1994 |