화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Photoluminescence from Er-doped Si-rich Si oxides deposited by magnetron sputtering in Ar or Ar+H-2 plasmas
Heng CL, Chelomentsev E, Zalloum OHY, Wojcik J, Mascher P
Journal of Vacuum Science & Technology A, 27(1), 101, 2009
2 Photoluminescence study of an Er-doped Si-rich SiOx film - Effects of annealing gas ambients and double-step processes
Heng CL, Zalloum OHY, Roschuk T, Blakie D, Wojcik J, Mascher P
Electrochemical and Solid State Letters, 10(7), K20, 2007
3 H-induced effects in luminescent silicon nanostructures obtained from plasma enhanced chemical vapor deposition grown SiyO1-y : H(y > 1/3) thin films annealed in (Ar+5%H-2)
Comedi D, Zalloum OHY, Irving EA, Wojcik J, Mascher P
Journal of Vacuum Science & Technology A, 24(3), 817, 2006