화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications
Muller R, Yulin S, Naujok P, Kaiser N, Tunnermann A
Thin Solid Films, 624, 1, 2017
2 Thermal stability of B-based multilayer mirrors for next generation lithography
Naujok P, Murray K, Yulin S, Patzig C, Kaiser N, Tunnermann A
Thin Solid Films, 642, 252, 2017
3 Interface characterization in B-based multilayer mirrors for next generation lithography
Naujok P, Yulin S, Muller R, Kaiser N, Tunnermann A
Thin Solid Films, 612, 414, 2016
4 Structural characterization of ultrathin Cr and Sc films for soft X-ray mirrors
Gorelik T, Kaiser U, Kuhlmann T, Yulin S, Richter W
Applied Surface Science, 230(1-4), 1, 2004