검색결과 : 4건
No. | Article |
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1 |
Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications Muller R, Yulin S, Naujok P, Kaiser N, Tunnermann A Thin Solid Films, 624, 1, 2017 |
2 |
Thermal stability of B-based multilayer mirrors for next generation lithography Naujok P, Murray K, Yulin S, Patzig C, Kaiser N, Tunnermann A Thin Solid Films, 642, 252, 2017 |
3 |
Interface characterization in B-based multilayer mirrors for next generation lithography Naujok P, Yulin S, Muller R, Kaiser N, Tunnermann A Thin Solid Films, 612, 414, 2016 |
4 |
Structural characterization of ultrathin Cr and Sc films for soft X-ray mirrors Gorelik T, Kaiser U, Kuhlmann T, Yulin S, Richter W Applied Surface Science, 230(1-4), 1, 2004 |