검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low-temperature Si epitaxial growth on oxide patterned wafers by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition Yuh HK, Park JW, Lim SH, Hwang KH, Yoon E Journal of Vacuum Science & Technology B, 19(2), 323, 2001 |