검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High density plasma deposited phosphosilicate glass as pre-metal dielectrics for advanced self-aligned contacts in sub 0.25 mu m device technology Yu JYE, Qiao JM, Jin B, Gopalan P, Feng JG Journal of Vacuum Science & Technology B, 17(5), 2272, 1999 |