검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Microscopic investigations of aluminum nitride thin films grown by low-temperature reactive sputtering Guo QX, Yoshitugu M, Tanaka T, Nishio M, Ogawa H Thin Solid Films, 483(1-2), 16, 2005 |
| No. | Article |
|---|---|
| 1 |
Microscopic investigations of aluminum nitride thin films grown by low-temperature reactive sputtering Guo QX, Yoshitugu M, Tanaka T, Nishio M, Ogawa H Thin Solid Films, 483(1-2), 16, 2005 |