검색결과 : 1건
No. | Article |
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1 |
Integrated AlN/diamond heat spreaders for silicon device processing Yoganand SN, Jagannadham K, Karoui A, Wang H Journal of Vacuum Science & Technology A, 20(6), 1974, 2002 |
No. | Article |
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1 |
Integrated AlN/diamond heat spreaders for silicon device processing Yoganand SN, Jagannadham K, Karoui A, Wang H Journal of Vacuum Science & Technology A, 20(6), 1974, 2002 |