검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by using Cl-2/BCl3 Neutral Beam Etching Yeon JK, Lim WS, Park JB, Kwon NY, Kim SI, Min KS, Chung IS, Kim YW, Yeom GY Journal of the Electrochemical Society, 158(5), D254, 2011 |
| 2 |
Fabrication of nano-crystalline silicon thin film at low temperature by using a neutral beam deposition method Kang SK, Jeon MH, Park JY, Lee HC, Park BJ, Yeon JK, Yeom GY Journal of Crystal Growth, 312(14), 2145, 2010 |
| 3 |
Highly Selective and Low Damage Etching of GaAs/AlGaAs Heterostructure using Cl-2/O-2 Neutral Beam Park BJ, Yeon JK, Lim WS, Kang SK, Bae JW, Yeom GY, Jhon MS, Shin SH, Chang KS, Song JI, Lee YT, Jang JH Plasma Chemistry and Plasma Processing, 30(5), 633, 2010 |