검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparison of positive tone versus negative tone resist pattern collapse bahavior* Yeh WM, Noga DE, Lawson RA, Tolbert LM, Henderson CL Journal of Vacuum Science & Technology B, 28(6), C6S6, 2010 |
| 2 |
Bond contribution model for the prediction of glass transition temperature in polyphenol molecular glass resists Lawson RA, Yeh WM, Henderson CL Journal of Vacuum Science & Technology B, 27(6), 3004, 2009 |