검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques Rommel M, Spoldi G, Yanev V, Beuer S, Amon B, Jambreck J, Petersen S, Bauer AJ, Frey L Journal of Vacuum Science & Technology B, 28(3), 595, 2010 |
| 2 |
Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy Weinreich W, Wilde L, Kucher P, Lemberger M, Yanev V, Rommel M, Bauer AJ, Erben E, Heitmann J, Schroder U, Oberbeck L Journal of Vacuum Science & Technology B, 27(1), 364, 2009 |