검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nanoscale Laser Processing of Hollow Silica Microbeads Assisted by Surface Plasmon Resonance of Gold Particles Furukawa K, Kameyama T, Okazaki K, Yako T, Otsuki M, Tsuboi Y, Torimoto T Chemistry Letters, 40(12), 1411, 2011 |
| 2 |
Aluminum chemical vapor deposition reaction of dimethylaluminum hydride on TiN studied by X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry Tanaka K, Yanashima H, Yako T, Kamio K, Sugai K, Kishida S Applied Surface Science, 171(1-2), 71, 2001 |
| 3 |
Aluminum Metallization Using a Combination of Chemical-Vapor-Deposition and Sputtering Sugai K, Kishida S, Shinzawa T, Okabayashi H, Yako T, Kadokura H, Isemura M, Kobayashi T, Hosokawa N Journal of the Electrochemical Society, 144(3), 1028, 1997 |
| 4 |
Aluminum Chemical-Vapor-Deposition with New Gas-Phase Pretreatment Using Tetrakisdimethylamino-Titanium for Ultralarge-Scale Integrated-Circuit Metallization Sugai K, Okabayashi H, Shinzawa T, Kishida S, Kobayashi A, Yako T, Kadokura H Journal of Vacuum Science & Technology B, 13(5), 2115, 1995 |