화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Preparation of nano-sized functional materials using laser ablation in liquids
Tsuji T, Nakanishi M, Mizuki T, Tsuji M, Doi T, Yahiro T, Yamaki J
Applied Surface Science, 255(24), 9626, 2009
2 Electrochemical insertion and extraction of lithium-ion at nano-sized LiMn2O4 particles prepared by a spray pyrolysis method
Doi T, Yahiro T, Okada S, Yamaki J
Electrochimica Acta, 53(27), 8064, 2008
3 Reaction of Si with HCl to form chlorosilanes - Time dependent nature and reaction model
Noda S, Tanabe K, Yahiro T, Osawa T, Komiyama H
Journal of the Electrochemical Society, 151(6), C399, 2004
4 Full-field exposure performance of electron projection lithography tool
Suzuki K, Hirayanagi N, Fujiwara T, Yamada A, Ikeda J, Yahiro T, Kojima S, Udagawa J, Yamamoto H, Katakura N, Suzuki M, Aoyama T, Takekoshi H, Umemoto T, Shimizu H, Fukui S, Suzuki S, Okino T, Ohkubo Y, Shimoda T, Tanida T, Watanabe Y, Kohama Y, Ohmori K, Mori F, Takemoto S, Yoshioka T, Hirose H, Morita K, Hada K, Kawata S, Kakizaki Y, Miura T
Journal of Vacuum Science & Technology B, 22(6), 2885, 2004
5 First dynamic exposure results from an electron projection lithography tool
Suzuki K, Fujiwara T, Kojima S, Hirayanagi N, Yahiro T, Udagawa J, Shimizu S, Yamamoto H, Suzuki M, Takekoshi H, Fukui S, Hamashima M, Ikeda J, Okino T, Shimizu H, Takahashi S, Yamada A, Umemoto T, Katagiri S, Ohkubo Y, Shimoda T, Hirose K, Tanida T, Watanabe Y, Kaminaga T, Kohama Y, Mori F, Takemoto S, Yoshioka T, Hirose H, Morita K, Hada K, Kawata S, Sato T, Sato Y, Tokunaga M, Okamoto K, Kakizaki Y, Miura T
Journal of Vacuum Science & Technology B, 21(6), 2686, 2003
6 Direct measurement of chromatic aberrations induced by SiNx continuous membrane mask
Yahiro T, Suzuki S, Irita T, Kawata S, Suzuki K
Journal of Vacuum Science & Technology B, 20(6), 2634, 2002
7 Direct measurement of Coulomb effects in electron beam projection lithography
Yahiro T, Suzuki S, Irita T, Hirayanagi N, Shimizu H, Kojima S, Morita K, Kawata S, Okino T, Suzuki K
Journal of Vacuum Science & Technology B, 19(6), 2468, 2001
8 Simultaneous Optical-Detection Techniques, Interferometry, and Optical Beam Deflection for Dynamic-Mode Control of Scanning Force Microscopy
Hoummady M, Farnault E, Yahiro T, Kawakatsu H
Journal of Vacuum Science & Technology B, 15(4), 1539, 1997