검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dependence of linewidth and its edge roughness on electron beam exposure dose Kotera M, Yagura K, Niu H Journal of Vacuum Science & Technology B, 23(6), 2775, 2005 |
| No. | Article |
|---|---|
| 1 |
Dependence of linewidth and its edge roughness on electron beam exposure dose Kotera M, Yagura K, Niu H Journal of Vacuum Science & Technology B, 23(6), 2775, 2005 |