검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Study on temperature calibration of a silicon substrate in a temperature programmed desorption analysis Hirashita N, Jimbo T, Matsunaga T, Matsuura M, Morita M, Nishiyama I, Nishizuka M, Okumura H, Shimazaki A, Yabumoto N Journal of Vacuum Science & Technology A, 19(4), 1255, 2001 |
| 2 |
Surface pits observed on SiO2 thermally grown at high temperatures on (111)-oriented Czochralski-silicon Itsumi M, Okazaki Y, Watanabe M, Ueki T, Yabumoto N Journal of the Electrochemical Society, 145(6), 2143, 1998 |
| 3 |
Phosphorus Pileup and Sublimation at the Silicon Surface Sato Y, Imai K, Yabumoto N Journal of the Electrochemical Society, 144(7), 2548, 1997 |
| 4 |
Highly Sensitive Analytical Method for Metallic Impurities in the Thin Silicon Layer of Silicon-on-Insulator Wafer Kodate J, Machida K, Imai K, Tanaka M, Yabumoto N Journal of Vacuum Science & Technology B, 15(1), 171, 1997 |
| 5 |
Investigation of Defect Concentration in Implanted Silicon Substrates by Hydrogen Decoration Saito K, Sato Y, Yabumoto N, Homma Y Journal of the Electrochemical Society, 143(12), 4101, 1996 |
| 6 |
Thin-Oxide Dielectric Strength Improvement by Adding a Phosphonic Acid Chelating Agent into Nh4Oh-H2O2 Solution Akiya H, Kuwano S, Matsumoto T, Muraoka H, Itsumi M, Yabumoto N Journal of the Electrochemical Society, 141(10), L139, 1994 |