검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Pena LF, Mattson EC, Nanayakkara CE, Oyekan KA, Mallikarjunan A, Chandra H, Xiao MC, Lei XJ, Pearlstein RM, Derecskei-Kovacs A, Chabal YJ Langmuir, 34(8), 2619, 2018 |