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| No. | Article |
|---|---|
| 1 |
High-Rate Reactive Ion Etch and Electron-Cyclotron-Resonance Etching of GaAs via Holes Using Thick Polyimide and Photoresist Masks Shul RJ, Lovejoy ML, Word JC, Howard AJ, Rieger DJ, Kravitz SH Journal of Vacuum Science & Technology B, 15(3), 657, 1997 |