검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films Van Bui H, Kovalgin AY, Wolters RAM Applied Surface Science, 269, 45, 2013 |
| 2 |
Strain characterization of FinFETs using Raman spectroscopy Kaleli B, van Hemert T, Hueting RJE, Wolters RAM Thin Solid Films, 541, 57, 2013 |
| 3 |
Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry Van Bui H, Groenland AW, Aarnink AAI, Wolters RAM, Schmitz J, Kovalgin AY Journal of the Electrochemical Society, 158(3), H214, 2011 |
| 4 |
Low Specific Contact Resistance of NiSi and PtSi to Si: Impact of Interface Tiggelman N, Kovalgin AY, Brennan R, Wolters RAM Electrochemical and Solid State Letters, 13(12), H450, 2010 |
| 5 |
Atomic layer deposition of W1.5N barrier films for Cu metallization Bystrova S, Aarnink AAI, Holleman J, Wolters RAM Journal of the Electrochemical Society, 152(7), G522, 2005 |
| 6 |
Low-cost and nanoscale non-volatile memory concept for future silicon chips Lankhorst MHR, Ketelaars BWSMM, Wolters RAM Nature Materials, 4(4), 347, 2005 |