검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Scaled measurements of global space-charge induced image blur in electron beam projection system Han LQ, Pease RF, Meisburger WD, Winograd GI, Takahashi K Journal of Vacuum Science & Technology B, 18(6), 2999, 2000 |
| 2 |
Space-charge-induced aberrations Winograd GI, Meisburger WD, Pease RFW Journal of Vacuum Science & Technology B, 17(6), 2803, 1999 |
| 3 |
Field size versus column shortness in high throughput electron beam lithography Han L, Pease RFW, Meisburger WD, Winograd GI, McCord MA Journal of Vacuum Science & Technology B, 17(6), 2830, 1999 |
| 4 |
Multiplexed blanker array for parallel electron beam lithography Winograd GI, Han L, McCord MA, Pease RFW, Krishnamurthi V Journal of Vacuum Science & Technology B, 16(6), 3174, 1998 |
| 5 |
Patterned negative electron affinity photocathodes for maskless electron beam lithography Schneider JE, Sen P, Pickard DS, Winograd GI, McCord MA, Pease RFW, Spicer WE, Baum AW, Costello KA, Davis GA Journal of Vacuum Science & Technology B, 16(6), 3192, 1998 |
| 6 |
Performance investigation of Coulomb interaction-limited high through put electron beam lithography based on empirical modeling Han LQ, McCord MA, Winograd GI, Pease RFW Journal of Vacuum Science & Technology B, 16(6), 3215, 1998 |
| 7 |
Blanked aperture array for parallel electron beam lithography Winograd GI, Pease RFW, McCord MA Journal of Vacuum Science & Technology B, 15(6), 2289, 1997 |
| 8 |
Semiconductor on Glass Photocathodes as High-Performance Sources for Parallel Electron-Beam Lithography Schneider JE, Baum AW, Winograd GI, Pease RF, Mccord M, Spicer WE, Costello KA, Aebi VW Journal of Vacuum Science & Technology B, 14(6), 3782, 1996 |