검색결과 : 1건
No. | Article |
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1 |
Characterization of low-temperature wafer bonding by infrared spectroscopy Milekhin A, Friedrich M, Hiller K, Wierner M, Gessner T, Zahn DRT Journal of Vacuum Science & Technology B, 18(3), 1392, 2000 |
No. | Article |
---|---|
1 |
Characterization of low-temperature wafer bonding by infrared spectroscopy Milekhin A, Friedrich M, Hiller K, Wierner M, Gessner T, Zahn DRT Journal of Vacuum Science & Technology B, 18(3), 1392, 2000 |