검색결과 : 2건
No. | Article |
---|---|
1 |
157 nm pellicles (thin films) for photolithography: Mechanistic investigation of the VUV and UV-C photolysis of fluorocarbons Lee K, Jockusch S, Turro NJ, French RH, Wheland RC, Lemon MF, Braun AM, Widerschpan T, Dixon DA, Li J, Ivan M, Zimmerman P Journal of the American Chemical Society, 127(23), 8320, 2005 |
2 |
Soluble perfluoropolymers Anolick C, Hrivnak JA, Wheland RC Advanced Materials, 10(15), 1211, 1998 |