화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 157 nm pellicles (thin films) for photolithography: Mechanistic investigation of the VUV and UV-C photolysis of fluorocarbons
Lee K, Jockusch S, Turro NJ, French RH, Wheland RC, Lemon MF, Braun AM, Widerschpan T, Dixon DA, Li J, Ivan M, Zimmerman P
Journal of the American Chemical Society, 127(23), 8320, 2005
2 Soluble perfluoropolymers
Anolick C, Hrivnak JA, Wheland RC
Advanced Materials, 10(15), 1211, 1998