화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Investigations into the mechanism of adsorption of carbon nanotubes onto aminopropylsiloxane functionalized surfaces
Burgin TP, Lewenstein JC, Werho D
Langmuir, 21(14), 6596, 2005
2 Spontaneous oxide reduction in metal stacks
Qin W, Volinsky AA, Werho D, Theodore ND, Kottke M, Ramiah C
Thin Solid Films, 473(2), 236, 2005
3 Impact of deposition and annealing temperature on material and electrical characteristics of ALD HfO2
Triyoso D, Liu R, Roan D, Ramon M, Edwards NV, Gregory R, Werho D, Kulik J, Tam G, Irwin E, Wang XD, La LB, Hobbs C, Garcia R, Baker J, White BE, Tobin P
Journal of the Electrochemical Society, 151(10), F220, 2004
4 Film properties of ALD HfO2 and La2O3 gate dielectrics grown on Si with various pre-deposition treatments
Triyoso DH, Hegde RI, Grant J, Fejes P, Liu R, Roan D, Ramon M, Werho D, Rai R, La LB, Baker J, Garza C, Guenther T, White BE, Tobin PJ
Journal of Vacuum Science & Technology B, 22(4), 2121, 2004
5 Stable titanium silicide formation on field oxide after BF2 ion implantation
Mollat M, Demkov AA, Fejes P, Werho D
Journal of Vacuum Science & Technology B, 19(2), 372, 2001
6 Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces
Pianetta P, Baur K, Singh A, Brennan S, Kerner J, Werho D, Wang J
Thin Solid Films, 373(1-2), 222, 2000
7 Is Ti Contamination in Si Wafer Processing an Issue
Chang LH, Cowden WG, Christiansen J, Werho D, Theodore ND
Journal of the Electrochemical Society, 143(7), 2353, 1996