검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Commercialization of SCALPEL masks Farrow RC, Novembre AE, Peabody M, Kasica R, Blakey M, Liddle JA, Werder K, DeMarco R, Ocola L, Rutberg L, Saunders T, Unruh J, Qian F, Smith M Journal of Vacuum Science & Technology B, 16(6), 3582, 1998 |