검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
CVD of Copper Using Copper(I) and Copper(II) Beta-Diketonates Naik MB, Gill WN, Wentorf RH, Reeves RR Thin Solid Films, 262(1-2), 60, 1995 |
| 2 |
Selective Deposition of Copper by Chemical-Vapor-Deposition Using Cu(Hfa)(2) Kim DH, Wentorf RH, Gill WN Journal of Vacuum Science & Technology A, 12(1), 153, 1994 |