검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Rigorous simulation of statistical electron-electron interactions with fast multipole acceleration and a network of workstations Wen VSH, Carmichael OT, Yamashita H, Neureuther AR Journal of Vacuum Science & Technology B, 16(6), 3221, 1998 |
| 2 |
Mask electron modeling for Coulomb interaction by mask-scattered electrons in electron-beam projection lithography Yamashita H, Wen VSH, Neureuther AR, Nomura E Journal of Vacuum Science & Technology B, 16(6), 3227, 1998 |