검색결과 : 1건
No. | Article |
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1 |
Monte Carlo simulations of sputter deposition and step coverage of thin films Coronell DG, Egan EW, Hamilton G, Jain A, Venkatraman R, Weitzman B Thin Solid Films, 333(1-2), 77, 1998 |
No. | Article |
---|---|
1 |
Monte Carlo simulations of sputter deposition and step coverage of thin films Coronell DG, Egan EW, Hamilton G, Jain A, Venkatraman R, Weitzman B Thin Solid Films, 333(1-2), 77, 1998 |