검색결과 : 1건
No. | Article |
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1 |
Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy Weinreich W, Wilde L, Kucher P, Lemberger M, Yanev V, Rommel M, Bauer AJ, Erben E, Heitmann J, Schroder U, Oberbeck L Journal of Vacuum Science & Technology B, 27(1), 364, 2009 |