화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Photochemistry of (Fulvalene)Tetracarbonyldiruthenium and Its Derivatives - Efficient Light Energy-Storage Devices
Boese R, Cammack JK, Matzger AJ, Pflug K, Tolman WB, Vollhardt KP, Weidman TW
Journal of the American Chemical Society, 119(29), 6757, 1997
2 Vapor-Phase SiO2 Etching and Metallic Contamination Removal in an Integrated Cluster System
Ma Y, Green ML, Feldman LC, Sapjeta J, Hanson KJ, Weidman TW
Journal of Vacuum Science & Technology B, 13(4), 1460, 1995
3 Application of Plasma-Polymerized Methylsilane Resist for All-Dry 193 nm Deep-Ultraviolet Processing
Kostelak RL, Weidman TW, Vaidya S, Joubert O, Palmateer SC, Hibbs M
Journal of Vacuum Science & Technology B, 13(6), 2994, 1995