검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Cyclic, cryogenic, highly anisotropic plasma etching of silicon using SF6/O-2 Isakovic AF, Evans-Lutterodt K, Elliott D, Stein A, Warren JB Journal of Vacuum Science & Technology A, 26(5), 1182, 2008 |
| 2 |
Transmission electron microscopy: A linewidth measurement technique for lithography Warren JB, Stein A Journal of Vacuum Science & Technology B, 24(6), 3077, 2006 |