검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Raised source/drains for 50 nm MOSFETs using a silane/dichlorosilane mixture for selective epitaxy Waite AM, Lloyd NS, Osman K, Zhang W, Ernst T, Achard H, Wang Y, Deleonibus S, Hernment PLF, Bagnall DM, Evans AGR, Ashburn P Solid-State Electronics, 49(4), 529, 2005 |