검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization at Different Aspect Ratios (Radius/Length) of a Radio-Frequency Inductively-Coupled Plasma Source Wainman PN, Lieberman MA, Lichtenberg AJ, Stewart RA, Lee C Journal of Vacuum Science & Technology A, 13(5), 2464, 1995 |