화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2
Ebm C, Hobler G, Waid S, Wanzenboeck HD
Journal of Vacuum Science & Technology B, 28(5), 946, 2010
2 Nanoimprint lithography stamp modification utilizing focused ion beams
Wanzenboeck HD, Waid S, Bertagnolli E, Muehlberger M, Bergmair I, Schoeftner R
Journal of Vacuum Science & Technology B, 27(6), 2679, 2009