검색결과 : 2건
No. | Article |
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1 |
Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2 Ebm C, Hobler G, Waid S, Wanzenboeck HD Journal of Vacuum Science & Technology B, 28(5), 946, 2010 |
2 |
Nanoimprint lithography stamp modification utilizing focused ion beams Wanzenboeck HD, Waid S, Bertagnolli E, Muehlberger M, Bergmair I, Schoeftner R Journal of Vacuum Science & Technology B, 27(6), 2679, 2009 |