검색결과 : 2건
No. | Article |
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1 |
Semi-analytic approximation of the temperature field resulting from moving heat loads Veldman DWM, Fey RHB, Zwart HJ, van de Wal MMJ, van den Boom JDBJ, Nijmeijer H International Journal of Heat and Mass Transfer, 122, 128, 2018 |
2 |
Heat Transfer between Wafer and Electrode in a High Density Plasma Etcher Im YH, Hahn YB Korean Journal of Chemical Engineering, 19(2), 347, 2002 |