검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Magneto-optical Kerr-effect studies on copper oxide thin films produced by atomic layer deposition on SiO2 Fronk M, Muller S, Waechtler T, Schulz SE, Mothes R, Lang H, Zahn DRT, Salvan G Thin Solid Films, 520(14), 4741, 2012 |
| 2 |
The Inhibition of Enhanced Cu Oxidation on Ruthenium/Diffusion Barrier Layers for Cu Interconnects by Carbon Alloying into Ru Ding SF, Xie Q, Mueller S, Waechtler T, Lu HS, Schulz SE, Detavernier C, Qu XP, Gessner T Journal of the Electrochemical Society, 158(12), H1228, 2011 |
| 3 |
Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2 Waechtler T, Oswald S, Roth N, Jakob A, Lang H, Ecke R, Schulz SE, Gessner T, Moskvinova A, Schulze S, Hietschold M Journal of the Electrochemical Society, 156(6), H453, 2009 |